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| International Standard Category: Semiconducting materials |
GB/T 24578-2009 Test method for measuring surface metal contamination on silicon wafers by total reflection X-ray fluorescence spectroscopy
硅片表面金属沾污的全反射X光荧光光谱测试方法;
| Category No.: | 29.045 | Valid Status: | superseded |
| Issued Organization: | AQSIQ;SAC | Issued Date: | 2009-10-30 |
| Implemented Date: | 2010-6-1 | Abolished Date: | |
| Superseded Standard.: | GB/T 24578-2015 Test method for measuring surface metal contamination on silicon wafers by total reflection X-Ray fluorescence spectroscopy |
Superseded Date: | 2017-1-1 |
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