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| International Standard Category: Semiconducting materials |
GB/T 24580-2009 Test method for measuring Boron contamination in heavily doped n-type silicon substrates by secondary ion mass spectrometry
重掺n型硅衬底中硼沾污的二次离子质谱检测方法;
| Category No.: | 29.045 | Valid Status: | valid |
| Issued Organization: | AQSIQ;SAC | Issued Date: | 2009-10-30 |
| Implemented Date: | 2010-6-1 | Abolished Date: | |
| Superseded Standard.: | Superseded Date: |
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