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| International Standard Category: Semiconducting materials |
GB/T 29505-2013 Test method for measuring surface roughness on planar surfaces of silicon wafer
硅片平坦表面的表面粗糙度测量方法;
| Category No.: | 29.045 | Valid Status: | valid |
| Issued Organization: | AQSIQ;SAC | Issued Date: | 2013-5-9 |
| Implemented Date: | 2014-2-1 | Abolished Date: | |
| Superseded Standard.: | Superseded Date: |
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