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| International Standard Category: Semiconducting materials |
GB/T 30868-2014 Test method for measuring micropipe density of monocrystalline silicon carbide wafers―Chemically etching
碳化硅单晶片微管密度的测定 化学腐蚀法 ;
| Category No.: | 29.045 | Valid Status: | valid |
| Issued Organization: | AQSIQ; SAC | Issued Date: | 2014-07-24 |
| Implemented Date: | 2015-2-1 | Abolished Date: | |
| Superseded Standard.: | Superseded Date: |
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