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| International Standard Category: Semiconducting materials |
YS/T 15-1991 Thcikness determination for silicon epitaxial layer and difussion layer - Angle lap-stain method
硅外延层和扩散层厚度测定 磨角染色法;
| Category No.: | 29.045 | Valid Status: | superseded |
| Issued Organization: | 0 | Issued Date: | |
| Implemented Date: | 1992-6-1 | Abolished Date: | |
| Superseded Standard.: | YS/T 15-2015 Test method for thickness of epitaxial layers and diffused layers by angle lap stain |
Superseded Date: | 2015-10-1 |
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