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International Standard Category: Other non-ferrous metals and their alloys

YS/T 839-2012    Test Method for Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry
硅衬底上绝缘体薄膜厚度及折射率的椭圆偏振测试方法;
Category No.:77.120.99 Valid Status:valid
Issued Organization:MIIT Issued Date:2012-11-7
Implemented Date:2013-3-1 Abolished Date:
Superseded Standard.: Superseded Date:
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