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Chinese National Standard Category: Semiconductor integrated circuit

English Title: Specification for measuring depth of focus and best focus
Chinese Title: 焦深与最佳聚焦的测量规范
Standard No.: GB/T 17865-1999
Category No.: L56
Issued by: CBTS
Issued on: 1999-9-1
Implemented on: 2000-6-1
Status: valid
Superseded by:
Superseded on:
Abolished on:
Superseding:
Word Count:3000 words
Similar Standards: T/CIE 079-2020   T/CIE 074-2020   T/CIE 067-2020   T/CIE 077-2020   T/CIE 072-2020   T/CIE 073-2020   T/CIE 155-2023   T/CIE 075-2020   T/CIE 069-2020   GB/T 13067-1991   T/CIE 071-2020   GB 9615-1988   T/CIE 068-2020   GB 7503-1987   T/CIE 081-2020   T/CIE 080-2020   T/CIE 070-2020   T/CIE 076-2020   GB/T 14027.6-1992   GB 6797-1986  
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