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Chinese National Standard Category: Semiconductor integrated circuit |
English Title: | Guideline for programmed defect masks and benchmark procedures for sensitivity analysis of mask defect inspection systems |
Chinese Title: | 掩模缺陷检查系统灵敏度分析所用的特制缺陷掩模和评估测量方法准则 |
Standard No.: | GB/T 17866-1999 |
Category No.: | L56 |
Issued by: | CBTS |
Issued on: | 1999-9-1 |
Implemented on: | 2000-6-1 |
Status: | valid |
Superseded by: | |
Superseded on: | |
Abolished on: | |
Superseding: | |
Word Count: | 5500 words |
Similar Standards: | T/CIE 079-2020 T/CIE 074-2020 T/CIE 067-2020 T/CIE 077-2020 T/CIE 072-2020 T/CIE 073-2020 T/CIE 155-2023 T/CIE 075-2020 T/CIE 069-2020 GB/T 13067-1991 T/CIE 071-2020 GB 9615-1988 T/CIE 068-2020 GB 7503-1987 T/CIE 081-2020 T/CIE 080-2020 T/CIE 070-2020 T/CIE 076-2020 GB/T 14027.6-1992 GB 6797-1986 |
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