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Chinese National Standard Category: Compound semiconductor material |
English Title: | Test method for measuring micropipe density of monocrystalline silicon carbide wafers―Chemically etching |
Chinese Title: | 碳化硅单晶片微管密度的测定 化学腐蚀法 |
Standard No.: | GB/T 30868-2014 |
Category No.: | H83 |
Issued by: | AQSIQ; SAC |
Issued on: | 2014-07-24 |
Implemented on: | 2015-2-1 |
Status: | valid |
Superseded by: | |
Superseded on: | |
Abolished on: | |
Superseding: | |
Word Count: | 3500 words |
Similar Standards: | GB/T 30652-2023 GB/T 30656-2023 GB/T 31092-2022 GB/T 20229-2022 GB/T 20230-2022 GB/T 20228-2021 GB/T 11094-2020 GB/T 36706-2018 GB/T 35305-2017 GB/T 35308-2017 YS/T 13-2015 GB/T 30656-2014 GB/T 31092-2014 GB/T 30854-2014 YS/T 978-2014 GB/T 30855-2014 YS/T 988-2014 GB/T 30856-2014 GB/T 30867-2014 GB/T 30868-2014 |
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