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Chinese National Standard Category: Microcircuit in general |
English Title: | Silicon-based MEMS fabrication technology - Specification for criterion of the bulk silicon piezoresistance process |
Chinese Title: | 硅基MEMS制造技术 体硅压阻加工工艺规范 |
Standard No.: | GB/T 32815-2016 |
Category No.: | L55 |
Issued by: | AQSIQ; SAC |
Issued on: | 2016-08-29 |
Implemented on: | 2017-3-1 |
Status: | valid |
Superseded by: | |
Superseded on: | |
Abolished on: | |
Superseding: | |
Word Count: | 12500 words |
Similar Standards: | GB/T 15431-1995 GB/T 34900-2017 GB/T 43538-2023 GB/T 43061-2023 GB/T 43536.1-2023 GB/Z 43510-2023 GB/T 43040-2023 GB/T 42972-2023 GB/T 43027-2023 GB/T 43063-2023 GB/T 15879.604-2023 GB/T 42706.1-2023 GB/T 41852-2022 GB/T 41853-2022 GB/T 7092-2021 GB/T 38762.2-2020 GB/T 38762.3-2020 GB/T 38762.1-2020 GB/T 38446-2020 GB/T 38447-2020 |
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