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Chinese National Standard Category: Computer application |
English Title: | Information model for containing process chamber IC equipment design |
Chinese Title: | 含工艺腔室类集成电路装备设计信息模型 |
Standard No.: | GB/T 37959-2019 |
Category No.: | J07 |
Issued by: | SAMR and SAC |
Issued on: | 2019-08-30 |
Implemented on: | 2020-3-1 |
Status: | valid |
Superseded by: | |
Superseded on: | |
Abolished on: | |
Superseding: | |
Word Count: | 8500 words |
Similar Standards: | GB/T 32854.1-2016 GB/T 15049.11-1997 GB/T 22270.5-2023 GB/Z 43339-2023 GB/T 40283.4-2023 GB/T 43209-2023 GB/T 42619-2023 GB/T 43148-2023 GB/T 41724-2022 GB/T 41723-2022 GB/T 41665-2022 GB/T 24114.1-2022 GB/T 41262-2022 GB/T 38002.2-2022 GB/T 41263-2022 GB/T 40329-2021 GB/T 40328-2021 GB/T 20720.4-2021 GB/T 40210-2021 GB/T 40019-2021 |
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