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| Chinese National Standard Category: Drugs for antipyretic, anodyne, anesthesia and central nervous system |
| English Title: | Determination of impurities in silica sol for polishing solution in semiconductor industry—Inductively coupled plasma atomic emission spectrometric method |
| Chinese Title: | 半导体抛光液用硅溶胶中杂质元素含量的测定 -电感耦合等离子体原子发射光谱法 |
| Standard No.: | JC/T 2133-2012 |
| Category No.: | C14 |
| Issued by: | MIIT |
| Issued on: | 2012-12-28 |
| Implemented on: | 2013-6-1 |
| Status: | valid |
| Superseded by: | |
| Superseded on: | |
| Abolished on: | |
| Superseding: | |
| Word Count: | 4000 words |
| Similar Standards: | JC/T 2133-2012 |
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