Standard No.:	GB/T 16945-2009
English Name:	Gas for electronic industry—Argon
Chinese Name:	电子工业用气体 氩
Chinese Classification:	G86    Industrial gas and chemical gas
Professional Classification:	GB    National Standard
ICS Classification:	71.100.20 71.100.20    Gases for industrial application 71.100.20
Issued by:	AQSIQ; SAC
Issued on:	2009-10-30
Implemented on:	2010-5-1
Status:	valid
Superseding:	GB/T 16945-1997 Gases for electronic industry--Argon
Language:	English
File Format:	PDF
Word Count:	2000 words
Price(USD):	84.00
Delivery:	via email in 1~3 business day

本标准规定了氩的技术要求,试验方法以及包装、标志、贮运及安全。
本标准适用于以深冷法从空气、合成氨尾气中提取的液态和气态氩以及经纯化方法得到的氩。氩用于系统的吹扫、保护和增压,它还可以用于化学汽相淀积、溅射、等离子及活性离子刻蚀剂和退火等不同工艺中。