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Standard Insuued on: 1992-02

GB/T 13388-1992    Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
硅片参考面结晶学取向X射线测量方法
Category No.:GB Valid Status:superseded
Issued Organization:CSBTS Issued Date:1992-02-19
Implemented Date:1992-10-1 Abolished Date:
Superseded Standard.:GB/T 13388-2009 Method for measuring crystallographic orientation of flats on single-crystal silicon slices and wafers by X-ray techniques
Superseded Date:2010-6-1
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JC 460.1-1992   GB/T 14140.1-1993   JJG 771-1992   GB/T 13386-1992   JJG 772-1992   JJG 773-1992   JJG 777-1992   JJG 780-1992   FZ/T 82002-1992   QJ 2298-1992   QJ 2275-1992   QJ 2261-1992   QJ 2233-1992   QJ 2257-1992   QJ 2301-1992   GB/T 4026-1992   QJ 2249-1992   QJ 2255-1992   GB 13398-1992   GB/T 13362.3-1992  

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