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| Standard Insuued on: 1993-01 |
GB/T 14847-1993 Test method for thickness of lightly doped silicon eqitaxial layers on heavily doped silicon substrates by infrared reflectance
重掺杂衬底上轻掺杂硅外延层厚度的红外反射测量方法
| Category No.: | GB | Valid Status: | superseded |
| Issued Organization: | SBTS | Issued Date: | 1993-01-02 |
| Implemented Date: | 1994-9-1 | Abolished Date: | |
| Superseded Standard.: | GB/T 14847-2010 Test method for thickness of lightly doped silicon epitaxial layers on heavily doped silicon substrates by infrared reflectance |
Superseded Date: | 2011-10-1 |
GB 14106-1993
GB/T 14719-1993
GB/T 14720-1993
GB/T 14064-1993
GB 14737-1993
GB/T 14687-1993
GB/T 14069-1993
GB/T 14110-1993
WBH 34-1993
FZ/T 10004-2008
LY/T 1083-2008
GB/T 14808-2001
YB/T 5013-1997
GB/T 14539.4-1993
GB/T 14766-1993
GB 9832-1993
GB/T 14093.3-1993
GB/T 14820.1-1993
GB/T 14817-1993
GB/T 14820.3-1993
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