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International Standard Category: Testing of metals in general

GB/T 19921-2005    Test method of particles on silicon wafer surfaces
硅抛光片表面颗粒测试方法 ;
Category No.:77.040.01 Valid Status:superseded
Issued Organization:AQSIQ, SAC Issued Date:2005-9-19
Implemented Date:2006-4-1 Abolished Date:
Superseded Standard.:GB/T 19921-2018 Test method for particles on polished silicon wafer surfaces
Superseded Date:2019-7-1
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