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| International Standard Category: Semiconducting materials |
GB/T 29507-2013 Test method for measuring flatness, thickness and total thickness vsriation on silicon wafers. Automated non-contact scanning
硅片平整度、厚度及总厚度变化测试 自动非接触扫描法 ;
| Category No.: | 29.045 | Valid Status: | valid |
| Issued Organization: | AQSIQ; SAC | Issued Date: | 2013-05-09 |
| Implemented Date: | Abolished Date: | ||
| Superseded Standard.: | Superseded Date: |
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