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Chinese National Standard Category: Electronic industry production equipment in general |
English Title: | Specification for registration marks for photomasks |
Chinese Title: | 光掩模对准标记规范 |
Standard No.: | GB/T 16524-1996 |
Category No.: | L95 |
Issued by: | State Technical Supervision Bureau |
Issued on: | 1996-09-09 |
Implemented on: | 1997-5-1 |
Status: | valid |
Superseded by: | |
Superseded on: | |
Abolished on: | |
Superseding: | |
Word Count: | 2500 words |
Similar Standards: | GB/T 41213-2021 GB/T 40577-2021 GB/T 29845-2013 GB/T 30116-2013 GB/T 16524-1996 |
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