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Chinese National Standard Category: Semimetal and semiconductor material analysis method

English Title: Test method for the content of metal impurity in electronic grade polysilicon—Inductively coupled-plasma mass spectrometry method
Chinese Title: 电子级多晶硅中基体金属杂质含量的测定 电感耦合等离子体质谱法
Standard No.: GB/T 37049-2018
Category No.: H17
Issued by: SAMR; SAC
Issued on:
Implemented on: 2019-4-1
Status: valid
Superseded by:
Superseded on:
Abolished on:
Superseding:
Word Count:5500 words
Similar Standards: GB/T 1558-2023   GB/T 35306-2023   GB/T 24582-2023   GB/T 42263-2022   GB/T 42276-2022   GB/T 42274-2022   GB/T 24581-2022   GB/T 41153-2021   GB/T 39145-2020   GB/T 39144-2020   GB/T 38976-2020   GB/T 37385-2019   GB/T 37211.2-2018   GB/T 37211.1-2018   GB/T 4059-2018   GB/T 1557-2018   GB/T 4060-2018   GB/T 37049-2018   GB/T 35309-2017   GB/T 35306-2017  
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