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Chinese National Standard Category: Basic standards and general methods |
English Title: | Surface chemical analysis - Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy |
Chinese Title: | 表面化学分析 全反射X射线荧光光谱法(TXRF)测定硅片表面元素污染 |
Standard No.: | GB/T 40110-2021 |
Category No.: | G04 |
Issued by: | SAMR; SAC |
Issued on: | 2021-05-21 |
Implemented on: | 2021-12-1 |
Status: | valid |
Superseded by: | |
Superseded on: | |
Abolished on: | |
Superseding: | |
Word Count: | 12500 words |
Similar Standards: | T/CCASC 3003-2023 T/CIQA 7-2020 T/CCASC 6007-2023 T/CCASC 3002-2023 GB/T 19502-2023 GB/T 43088-2023 GB/T 22461.1-2023 GB/T 42658.4-2023 GB/T 42659-2023 GB/T 42310-2023 GB/T 42518-2023 GB/T 22461.2-2023 GB/T 42543-2023 GB/T 42360-2023 GB/T 6488-2022 GB/T 21636-2021 GB/T 41073-2021 GB/T 41064-2021 GB/T 41076-2021 GB/T 29732-2021 |
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