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Standard
| DB31/ 506-2020 The norm of energy consumption per unit product of wafer fabrication in integrated circuits (English Version) |
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Detail of DB31/ 506-2020
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Introduction of DB31/ 506-2020
本文件规定了集成电路晶圆制造过程的单位产品能源消耗（以下简称能耗)限额的技术要求、统计范围、计算方法、节能管理与措施。
本文件适用于集成电路晶圆制造企业单位产品能耗的计算与考核，以及对新建及改扩建项目的能耗控制。
本文件不适用于12英寸40 nm及以下工艺制程的集成电路制造企业
Contents of DB31/ 506-2020