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| GB/T 1558-2023 Test method for substitutional carbon content in silicon by infrared absorption (English Version) |
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Detail of GB/T 1558-2023
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Introduction of GB/T 1558-2023
本文件描述了硅中代位碳原子含量的红外吸收测试方法。
本文件适用于电阻率大于3 Ω・cm的p型硅单晶片及电阻率大于1 Ω・cm的n型硅单晶片中代位碳原子含量的测试(室温下测试范围：5×1015 cm-3至硅中碳原子的最大固溶度；温度低于80 K时测试范围：不小于5×1014 cm-3)。
Contents of GB/T 1558-2023