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| GB/T 15873-1995 Directives for drafting semiconductor facilities interface specification (English Version) |
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Detail of GB/T 15873-1995
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Introduction of GB/T 15873-1995
本标准规定了半导体设施接口技术文件编写的基本要求和格式。本标准适用于半导体设施的设计、施工、供应、管理、培训及使用。
Contents of GB/T 15873-1995