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Standard
| GB/T 16878-1997 Specification for metrology pattern cells for integrated circuit manufacture (English Version) |
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Detail of GB/T 16878-1997
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Introduction of GB/T 16878-1997
本规范规定若干种标准测试图形，用以对集成电路生产中所用的微图形设备、计量仪器和工艺进行一致的全面评估和检测。
Contents of GB/T 16878-1997