GB/T 16879-1997 English Version, GB/T 16879-1997 Guidelines for precision and accuracy expression for mask writing equipment (English Version)

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GB/T 16879-1997 Guidelines for precision and accuracy expression for mask writing equipment (English Version)
Standard No.:	GB/T 16879-1997	Status:	valid remind me the status change Email:
Target Language:	English	File Format:	PDF
Word Count:	4000 words	Translation Price(USD):	120.0 remind me the price change Email:
Implemented on:	1998-3-1	Delivery:	via email in 1~3 business day

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Standard No.:	GB/T 16879-1997
English Name:	Guidelines for precision and accuracy expression for mask writing equipment
Chinese Name:	掩模曝光系统精密度和准确度的表示准则
Chinese Classification:	L97 Dedicated processing equipment
Professional Classification:	GB National Standard
Source Content Issued by:	CSBTS
Issued on:	1997-6-20
Implemented on:	1998-3-1
Status:	valid
Target Language:	English
File Format:	PDF
Word Count:	4000 words
Translation Price(USD):	120.0
Delivery:	via email in 1~3 business day

Standard

GB/T 16879-1997 Guidelines for precision and accuracy expression for mask writing equipment (English Version)
Standard No.	GB/T 16879-1997
Status	valid
Language	English
File Format	PDF
Word Count	4000 words
Price(USD)	120.0
Implemented on	1998-3-1
Delivery	via email in 1~3 business day

Detail of GB/T 16879-1997

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Introduction of GB/T 16879-1997

本准则规定了在表示掩模曝光设备的精密度和准确度时应遵循的一般要求。掩模曝光设备的图形曝光精密度和准确度是通过测量制成的掩模来评估的，掩膜制造过程中的工艺条件对它有很大影响。所以，曝光条件应经厂家和用户双方同意。

Contents of GB/T 16879-1997

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