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Standard
| GB/T 16880-1997 Guidelines for photomask defect classification and size definition (English Version) |
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Detail of GB/T 16880-1997
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Introduction of GB/T 16880-1997
本准则的范围是制定有关光掩模缺陷分类用的标准术语，并规定缺陷大小的表达方法。确定光掩模缺陷时应遵循这个准则。
Contents of GB/T 16880-1997