GB/T 17864-1999 English Version, GB/T 17864-1999 CD Metrology procedures (English Version)

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GB/T 17864-1999 CD Metrology procedures (English Version)
Standard No.:	GB/T 17864-1999	Status:	valid remind me the status change Email:
Language:	English	File Format:	PDF
Word Count:	4500 words	Price(USD):	130.00 remind me the price change Email:
Implemented on:	2000-6-1	Delivery:	via email in 1~3 business day

Standard No.:	GB/T 17864-1999
English Name:	CD Metrology procedures
Chinese Name:	关键尺寸（CD）计量方法
Chinese Classification:	L56 Semiconductor integrated circuit
Professional Classification:	GB National Standard
Issued by:	CBTS
Issued on:	1999-9-1
Implemented on:	2000-6-1
Status:	valid
Superseding:	GB/T 9043-1988
Language:	English
File Format:	PDF
Word Count:	4500 words
Price(USD):	130.00
Delivery:	via email in 1~3 business day

Standard

GB/T 17864-1999 CD Metrology procedures (English Version)
Standard No.	GB/T 17864-1999
Status	valid
Language	English
File Format	PDF
Word Count	4500 words
Price(USD)	130.0
Implemented on	2000-6-1
Delivery	via email in 1~3 business day

Detail of GB/T 17864-1999

Standard No.

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Introduction of GB/T 17864-1999

本标准的目的是规定计量系统进行光刻工艺中CD图形尺寸计量精确度的统一方法。本标准不涉及如何用这些计量系统去解决问题，也不涉及工艺中其他影响因素的变化，如大圆片的热处理、曝光机的聚集控制、以及材料等。

Contents of GB/T 17864-1999

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