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Standard
| GB/T 18193-2000 Vacuum technology - Mass-spectrometer-type leak detector calibration (English Version) |
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Detail of GB/T 18193-2000
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Introduction of GB/T 18193-2000
本标准规定了质谱检漏仪的校准程序。它仅适用于校准将灵敏件处于高真空系统中的检漏仪。因此这个方法没有制订完整的验收试验。本标准规定探索气体使用氦-4。但在适当的预防措施下，可以使用其他探索气体，如氩-40。本标准的应用受到检漏仪不能测定小于10-12Pa·m3·s-1漏率漏孔限制。本标准程序提出了测定最小可检漏率和最小可检浓度比的两个要点。它分别应用于高真空和压力大于一个大气压的检漏仪上。
Contents of GB/T 18193-2000