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| Position: Chinese Standard in English/GB/T 29844-2013 |
| GB/T 29844-2013 Specifications for metrology patterns for the evaluation of advanced photolithgraphy (English Version) | |||
| Standard No.: | GB/T 29844-2013 | Status: | valid remind me the status change |
| Language: | English | File Format: | |
| Word Count: | 5500 words | Price(USD): | 200.00 remind me the price change |
| Implemented on: | 2014-4-15 | Delivery: | via email in 1~3 business day |
| Standard No.: | GB/T 29844-2013 |
| English Name: | Specifications for metrology patterns for the evaluation of advanced photolithgraphy |
| Chinese Name: | 用于先进集成电路光刻工艺综合评估的图形规范 |
| Chinese Classification: | L90 Special electronic technology material |
| Professional Classification: | GB National Standard |
| Issued by: | AQSIQ; SAC |
| Issued on: | 2013-11-12 |
| Implemented on: | 2014-4-15 |
| Status: | valid |
| Language: | English |
| File Format: | |
| Word Count: | 5500 words |
| Price(USD): | 200.00 |
| Delivery: | via email in 1~3 business day |