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| Position: Chinese Standard in English/GB/T 32814-2016 |
| GB/T 32814-2016 Fabrication Technology of Silicon Based MEMS Process Specification Based on SOI Silicon (English Version) | |||
| Standard No.: | GB/T 32814-2016 | Status: | valid remind me the status change |
| Language: | English | File Format: | |
| Word Count: | 7500 words | Price(USD): | 220.00 remind me the price change |
| Implemented on: | 2017-3-1 | Delivery: | via email in 1~3 business day |
| Standard No.: | GB/T 32814-2016 |
| English Name: | Fabrication Technology of Silicon Based MEMS Process Specification Based on SOI Silicon |
| Chinese Name: | 硅基MEMS制造技术 基于SOI硅片的MEMS工艺规范 |
| Chinese Classification: | L55 Microcircuit in general |
| Professional Classification: | GB National Standard |
| Issued by: | AQSIQ; SAC |
| Issued on: | 2016-08-29 |
| Implemented on: | 2017-3-1 |
| Status: | valid |
| Language: | English |
| File Format: | |
| Word Count: | 7500 words |
| Price(USD): | 220.00 |
| Delivery: | via email in 1~3 business day |