GB/T 32815-2016 English Version, GB/T 32815-2016 Silicon-based MEMS fabrication technology - Specification for criterion of the bulk silicon piezoresistance process (English Version)

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GB/T 32815-2016 Silicon-based MEMS fabrication technology - Specification for criterion of the bulk silicon piezoresistance process (English Version)
Standard No.:	GB/T 32815-2016	Status:	valid remind me the status change Email:
Target Language:	English	File Format:	PDF
Word Count:	12500 words	Translation Price(USD):	370.0 remind me the price change Email:
Implemented on:	2017-3-1	Delivery:	via email in 1~5 business day

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Standard No.:	GB/T 32815-2016
English Name:	Silicon-based MEMS fabrication technology - Specification for criterion of the bulk silicon piezoresistance process
Chinese Name:	硅基MEMS制造技术体硅压阻加工工艺规范
Chinese Classification:	L55 Microcircuit in general
Professional Classification:	GB National Standard
Source Content Issued by:	AQSIQ; SAC
Issued on:	2016-08-29
Implemented on:	2017-3-1
Status:	valid
Target Language:	English
File Format:	PDF
Word Count:	12500 words
Translation Price(USD):	370.0
Delivery:	via email in 1~5 business day

Standard

GB/T 32815-2016 Silicon-based MEMS fabrication technology - Specification for criterion of the bulk silicon piezoresistance process (English Version)
Standard No.	GB/T 32815-2016
Status	valid
Language	English
File Format	PDF
Word Count	12500 words
Price(USD)	370.0
Implemented on	2017-3-1
Delivery	via email in 1~5 business day

Detail of GB/T 32815-2016

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Introduction of GB/T 32815-2016

本标准规定了采用体硅压阻工艺进行MEMS器件加工时应遵循的工艺要求和质量检验要求。�
本标准适用于硅基MEMS制造技术中基于背腔腐蚀和硅�玻璃键合的体硅压阻加工工艺的加工和质量检验。

Contents of GB/T 32815-2016

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