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| GB/T 42263-2022 Determination of nitrogen content in silicon single crystal—Secondary ion mass spectrometry method (English Version) |
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Detail of GB/T 42263-2022
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Introduction of GB/T 42263-2022
本文件描述了硅单晶中氮含量的二次离子质谱测试方法。本文件适用于硼、锑、砷、磷的掺杂浓度小于1×10??20? cm??-3?（0.2%）的硅单晶中氮含量的测定，测定范围不小于1×10??14? cm??-3?。注： 硅单晶中氮含量以每立方厘米中的原子数计。
Contents of GB/T 42263-2022