Standard No.:	GB/T 42659-2023
English Name:	Surface chemical analysis―Scanning probe microscopy―Determination of geometric quantities using SPM:Calibration of measuring systems
Chinese Name:	表面化学分析 扫描探针显微术 采用扫描探针显微镜测定几何量：测量系统校准
Chinese Classification:	G04    Basic standards and general methods
Professional Classification:	GB    National Standard
ICS Classification:	71.040.40 71.040.40    Chemical analysis 71.040.40
Issued by:	SAMR; SAC
Issued on:	2023-08-06
Implemented on:	2024-3-1
Status:	valid
Language:	English
File Format:	PDF
Word Count:	23000 words
Price(USD):	690.0
Delivery:	via email in 1~3 business day

GB/T 42659-2023 Surface chemical analysis- Scanning probe microscopy - Determination of geometric quantities using SPM : Calibration of measuring systems 1 Scope This document specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required. This document has the following objectives: - to increase the comparability of measurements of geometrical quantities made using SPMs by traceability to the unit of length; - to define the minimum requirements for the calibration process and the conditions of acceptance; - to ascertain the instrument's ability to be calibrated (assignment of a “calibrate-ability" category to the instrument); - to define the scope of the calibration (conditions of measurement and environments, ranges of measurement, temporal stability, transferability); - to provide a model, in accordance with ISO/IEC Guide 98-3, to calculate the uncertainty for simple geometrical quantities in measurements using an SPM; - to define the requirements for reporting results. 2 Normative references The following referenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies. ISO 11039 Surface chemical analysis - Scanning-probe microscopy - Measurement of drift rate ISO 18115-2 Surface chemical analysis - Vocabulary - Part 2 : Terms used in scanning-probe microscopy Note: GB/T 22461.2-2023 Surface chemical analysis – Vocabulary - Part 2:Terms used in scanning probe microscopy (ISO 18115-2:2021, MOD) ISO/IEC Guide 98-3 Uncertainty of measurement - Part 3 : Guide to the expression of uncertainty in measurement (GUM:1995) Note: GB/T 27418-2017 Guide to the evaluation and expression of uncertainty in measurement (ISO/IEC Guide 98 3: 2008, MOD) IEC/TS 62622 Artificial gratings used in nanotechnology - Description and measurement of dimensional quality parameters 3 Terms and definitions For the purposes of this document, the terms and definitions given in ISO 18115-2 and IEC/TS 62622 and the following apply. 3.1 scanner bow additional deflection in the z-direction when the scanner is displaced in the x-y-direction Note : Scanner bow is also known as out-of-plane motion (see xtz and ytz in Clause 4). 3.2 look-up table table in which a set of correction factors for the scanner are filed for different modes of operation (e.g. scan ranges, scan speeds, deflections) 3.3 step height height of an elevation (bar) or depth of a groove (see ISO 5436-1); on atomic surfaces, the distance between neighbouring crystalline planes 3.4 levelling correction of the inclination between the ideal x-y-specimen plane and the x-y-scanning plane 4 Symbols For the purpose of this document, the following symbols apply. ax - vector in the x-direction of a grating (not to be confused with px) ay - vector in the y-direction of a grating(not to be confused with py) Cx, Cy, Cz, - calibration factors for the x-, y-, and z-axes cos(φi) - rotational correction, for example in pitch measurement cos(θi) - tilt-related correction, for example in pitch measurement h - step height jx - angle of rotation about the x-axis jy - angle of rotation about the y-axis jz - angle of rotation about the z-axis Nij - ith pitch value in a profile used for the determination of the pitch/period (number of pitch values i over all lines j= .... Nj) P-V - peak-to-valley value px - pitch or period in the x-direction py - pitch or period in the y-direction Rq (Sq) - root mean square deviation of the assessed roughness profile (Rq) or of the assessed area (Sq) Rqx- noise in the x-direction Rqy - noise in the y-direction Rqz (Sqz) - noise in the z-direction in a measured profile (or within a measured area) r - tip radius T - temperature TL - temperature of the air Tm - temperature of the specimen during measurement v - scan speed (i.e. distance travelled by the probe tip per unit time, not to be confused with the scan rate, i.e. the number of scanlines recorded per unit time) w - width of specimen x, y, z - position value related to the respective axis xL - value of the measurement standard for shift in the x-direction xm - shift in the x-direction measured with the x-displacement transducer xrx - rotational deviation jx measured along an x-coordinate line xry - rotational deviation jy measured along an x-coordinate line xrz - rotational deviation jz measured along an x-coordinate line xtx - positional deviation △x measured along an x-coordinate line xty - positional deviation △y measured along an x-coordinate line xtz - positional deviation △z measured along an x-coordinate line xwy - measured rectangularity deviation in the coordinate plane x-y xwz - measured rectangularity deviation in the coordinate plane x-z yL - value of the measurement standard for displacement in the y-direction ym - displacement measured with the y-displacement transducer in the y-direction yrx - rotational deviation jx measured along a y-coordinate line yry - rotational deviation jy measured along a y-coordinate line yrz - rotational deviation jz measured along a y-coordinate line ytx - straightness deviation △x measured along a y-coordinate line yty - positional deviation △y measured along a y-coordinate line ytz - straightness deviation △z measured along a y-coordinate line ywz - rectangularity deviation measured in the coordinate plane y-z zL - value of the measurement standard for displacement in the z-direction zm - displacement in the z-direction measured with z-displacement transducer zrx - rotational deviation jx measured along a z-coordinate line zry - rotational deviation jy measured along a z-coordinate line zrz - rotational deviation jz measured along a z-coordinate line ztx - straightness deviation △x measured along a z-coordinate line zty - straightness deviation △y measured along a z-coordinate line ztz - positional deviation △z measured along a z-coordinate line am - thermal expansion coefficient of the specimen rxy - non-orthogonality of 2D gratings θ - levelling angle ∧ - correlation length λs - short-wavelength filter (see ISO 4287 for details) λc - long-wavelength filter (see ISO 4287 for details) φxy - angle between the x- and y-direction, counterclockwise φxz- angle between the x- and z-direction, counterclockwise φyz - angle between the y- and z-direction, counterclockwise 5 Characteristics of SPMs 5.1 Components of an SPM