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| GB/T 42676-2023 Test method for crystalline quality of semiconductive single crystal―X-ray diffraction method (English Version) |
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Detail of GB/T 42676-2023
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Introduction of GB/T 42676-2023
本文件描述了利用X射线衍射仪测试半导体材料双晶摇摆曲线半高宽，进而评价半导体单晶晶体质量的方法。本文件适用于碳化硅、金刚石、氧化镓等单晶材料晶体质量的测试，硅、砷化镓、磷化铟等半导体材料晶体质量的测试也可参照本文件执行。
Contents of GB/T 42676-2023