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| SJ/T 10583-1994 General specification for gas mass flow controller (English Version) |
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Detail of SJ/T 10583-1994
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Introduction of SJ/T 10583-1994
本标准规定了气体质量流量控制器的技术要求、试验方法、检验规则及标志、包装、运输、贮存。本标准适用于采用毛细管传热温差量热法原理进行测量的气体质量流量控制器（以下简称控制器）。该控制器广泛应用于半导体集成电路工艺设备、光纤熔炼，以及化工、冶金、卫生等部门。
Contents of SJ/T 10583-1994