Standard No.:	SJ/T 10583-1994
English Name:	General specification for gas mass flow controller
Chinese Name:	气体质量流量控制器通用技术条件
Chinese Classification:	L98    Dedicated inspection equipment
Professional Classification:	SJ    Professional Standard - Electronics
Issued by:	Ministry of Electronics Industry
Issued on:	1994-08-08
Implemented on:	1994-12-1
Status:	abolished
Superseded by:	SJ/T 10583-2016 General specification for gas mass flow controller
Superseded on:	2016-9-1
Abolished on:	2016-09-01
Language:	English
File Format:	PDF
Word Count:	8000 words
Price(USD):	240.00
Delivery:	via email in 1~3 business day

本标准规定了气体质量流量控制器的技术要求、试验方法、检验规则及标志、包装、运输、贮存。本标准适用于采用毛细管传热温差量热法原理进行测量的气体质量流量控制器（以下简称控制器）。该控制器广泛应用于半导体集成电路工艺设备、光纤熔炼，以及化工、冶金、卫生等部门。