Standard No.:	SJ/T 11275-2002
English Name:	Generic specification for horizontal liquid phase epitaxial system
Chinese Name:	卧式液相外延系统通用规范
Chinese Classification:	L92    Insulating parts for electronic equipment
Professional Classification:	SJ    Professional Standard - Electronics
Source Content Issued by:	State Economic and Trade Commission
Issued on:	2002-10-30
Implemented on:	2003-3-1
Status:	valid
Target Language:	English
File Format:	PDF
Word Count:	5000 words
Translation Price(USD):	150.0
Delivery:	via email in 1~3 business day

本规范规定了卧式液相外延系统的术语、产品型号及命名方法、技术要求、试验方法、检验规则以及包装、运输、贮存。本规范适用于电子行业光电子器件研制、生产工艺中的卧式液相外延系统。其他行业的类似设备亦可参照执行。