 |
|
Standard
| T/CEMIA 023-2021 Quartz crucible for semiconductor monosilicon growth (English Version) |
|
|
|
|
|
|
|
|
Detail of T/CEMIA 023-2021
| Standard No. |
|
| English Name |
|
| Chinese Name |
|
| Chinese Classification |
|
| Professional Classification |
|
| ICS Classification |
|
| Issued by |
|
| Issued on |
|
| Implemented on |
|
| Status |
|
| Superseded by |
|
| Superseded on |
|
| Abolished on |
|
| Superseding |
|
| Language |
|
| File Format |
| Word Count |
| Price(USD) |
|
| Keywords |
|
Introduction of T/CEMIA 023-2021
本文件界定了半导体单晶硅生长用石英坩埚的术语和定义，规定了规格尺寸、技术要求、试验方法、检验规则、标志、包装、运输、储存。
本文件适用于以高纯石英砂(成分：二氧化硅)为原料，采用电弧熔融法生产，用于半导体单晶硅生长的石英坩埚。
Contents of T/CEMIA 023-2021