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| T/CEMIA 024-2021 Quartz crucible manufacturing practices for semiconductor monosilicon growth (English Version) |
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Introduction of T/CEMIA 024-2021
本文件确立了半导体单晶硅生长用石英坩埚从业人员、生产设备、主要原辅材料、生产工艺、作业环境及产品质量管控的程序和总体原则。
本文件适用于半导体单晶硅生长用石英坩埚的生产过程。
Contents of T/CEMIA 024-2021