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Introduction of T/CEMIA 030-2022
本文件规定了半导体用正胶显影液的分类和标记、要求、检验方法、检验规则以及标志、包装、运输、贮存和安全。
本文件适用于半导体用正胶显影液，其主要组分为通过季铵盐化合物电解制得的四甲基氢氧化铵。
四甲基氢氧化铵的基本信息见附录A中的A.1。
Contents of T/CEMIA 030-2022