Standard No.:	T/JSSES 16-2021
English Name:	Technical requirements and test method for comprehensive utilization of waste sulfuric acid in integrated circuit manufacturing industry
Chinese Name:	集成电路行业废硫酸综合利用技术要求及试验方法
Chinese Classification:	G11    Inorganic acid and alkali
Professional Classification:	T/    Social Organization Standard
ICS Classification:	71.060.30 71.060.30    Acids 71.060.30
Issued on:	2021-05-28
Status:	valid
Language:	English
File Format:	PDF
Word Count:	3500 words
Price(USD):	105.0
Delivery:	via email in 1~3 business day

本文件规定了集成电路生产制造过程中废硫酸综合利用的技术要求、试验方法、检验规则、标志、随行文件、包装、运输、贮存、安全。
本文件适用于集成电路生产制造过程中废硫酸的综合利用。