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| YS/T 1024-2015 Tantalum sputtering targets (English Version) |
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Detail of YS/T 1024-2015
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Introduction of YS/T 1024-2015
本标准规定了用以制备薄膜的溅射用钽靶材的要求、试验方法、检验规则及标志、包装、运输、贮存、质量证明书和订货单（或合同）内容。本标准适用于以真空电子束熔炼的高纯钽锭为原料，通过塑性加工、热处理、机械加工、焊接等方法制造的溅射用钽靶材。
Contents of YS/T 1024-2015