Standard No.:	YS/T 1167-2016
English Name:	Monocrystalline silicon etched wafers
Chinese Name:	硅单晶腐蚀片
Professional Classification:	YS    Professional Standard - Non-ferrous Metal
Issued by:	Ministry of Industry and Information Technology
Issued on:	2016-07-11
Implemented on:	2017-1-1
Status:	valid
Language:	English
File Format:	PDF
Word Count:	6500 words
Price(USD):	180.00
Delivery:	via email in 1~3 business day

本标准规定了硅单晶腐蚀片的牌号及分类、要求、试验方法、检验规则以及标志、包装、运输、贮存、质量证明书和订货单（或合同）内容。
本标准适用于直拉法、悬浮区熔法（包括区熔中子嬗变和气相掺杂）制备的硅单晶研磨片经化学腐蚀液去除表面损伤层后制备的酸腐蚀片和碱腐蚀片。产品主要用于制作晶体管、整流管、特大功率晶闸管、光电器件等半导体元器件或进一步加工成硅抛光片。