Standard No.:	YS/T 936-2013
English Name:	Sputtering nickel vanadium alloy target used in integrated circuit device
Chinese Name:	集成电路器件用镍钒合金靶材
Chinese Classification:	H62    Heavy metals and their alloys
Professional Classification:	YS    Professional Standard - Non-ferrous Metal
ICS Classification:	77.150.40 77.150.40    Nickel and chromium products 77.150.40
Issued by:	Ministry of Industry and Information Technology
Issued on:	2013-10-17
Implemented on:	2014-3-1
Status:	valid
Language:	English
File Format:	PDF
Word Count:	8500 words
Price(USD):	250.0
Delivery:	via email in 1~3 business day

本标准规定了集成电路器件用镍钒合金溅射靶材的要求、试验方法、检验规则和标志、包装、运输、贮存、质量证明书及合同或订货单内容。
本标准适用于电子薄膜制造用的各类镍钒合金溅射靶材。