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| Chinese National Standard Category: Microcircuit in general |
| English Title: | Micro-electromechanical system technology—Terms |
| Chinese Title: | 微机电系统（MEMS）技术 术语 |
| Standard No.: | GB/T 26111-2010 |
| Category No.: | L55 |
| Issued by: | AQSIQ |
| Issued on: | 2011-1-10 |
| Implemented on: | 2011-10-1 |
| Status: | superseded |
| Superseded by: | GB/T 26111-2023 Micro-electromechanical system technology—Terms |
| Superseded on: | 2023-9-1 |
| Abolished on: | |
| Superseding: | |
| Word Count: | 19000 words |
| Similar Standards: | GB/T 43538-2023 GB/T 43061-2023 GB/T 43536.1-2023 GB/Z 43510-2023 GB/T 43040-2023 GB/T 42972-2023 GB/T 43027-2023 GB/T 43063-2023 GB/T 15879.604-2023 GB/T 42706.1-2023 GB/T 41852-2022 GB/T 41853-2022 GB/T 7092-2021 GB/T 38762.2-2020 GB/T 38762.3-2020 GB/T 38762.1-2020 GB/T 38446-2020 GB/T 38447-2020 GB/T 15879.4-2019 GB/T 15879.5-2018 |
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