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| Chinese National Standard Category: Semimetal and semiconductor material analysis method |
| English Title: | Determination of boron,aluminum and nitrogen impurity content in silicon carbide single crystal―Secondary ion mass spectrometry |
| Chinese Title: | 碳化硅单晶中硼、铝、氮杂质含量的测定 二次离子质谱法 |
| Standard No.: | GB/T 41153-2021 |
| Category No.: | H17 |
| Issued by: | SAMR; SAC |
| Issued on: | 2021-12-31 |
| Implemented on: | 2022-7-1 |
| Status: | valid |
| Superseded by: | |
| Superseded on: | |
| Abolished on: | |
| Superseding: | |
| Word Count: | 3500 words |
| Similar Standards: | GB/T 1558-2023 GB/T 35306-2023 GB/T 24582-2023 GB/T 42263-2022 GB/T 42276-2022 GB/T 42274-2022 GB/T 24581-2022 GB/T 41153-2021 GB/T 39145-2020 GB/T 39144-2020 GB/T 38976-2020 GB/T 37385-2019 GB/T 37211.2-2018 GB/T 37211.1-2018 GB/T 4059-2018 GB/T 1557-2018 GB/T 4060-2018 GB/T 37049-2018 GB/T 35309-2017 GB/T 35306-2017 |
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