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| Chinese National Standard Category: Micromodule |
| English Title: | Micro-electromechanical systems(MEMS) technology―Tensile strength test method for nano-scale membranes of silicon based MEMS |
| Chinese Title: | 微机电系统（MEMS）技术 硅基MEMS纳米厚度膜抗拉强度试验方法 |
| Standard No.: | GB/T 42897-2023 |
| Category No.: | L59 |
| Issued by: | SAMR; SAC |
| Issued on: | 2023-08-06 |
| Implemented on: | 2023-12-1 |
| Status: | valid |
| Superseded by: | |
| Superseded on: | |
| Abolished on: | |
| Superseding: | |
| Word Count: | 7500 words |
| Similar Standards: | GB/T 42897-2023 GB/T 42896-2023 GB/T 42895-2023 GB/T 42597-2023 GB/T 26111-2023 GB/T 42191-2023 GB/T 42158-2023 SJ 20527/5-2002 |
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