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Position: Chinese Standard in English/GB/T 42897-2023
GB/T 42897-2023   Micro-electromechanical systems(MEMS) technology―Tensile strength test method for nano-scale membranes of silicon based MEMS (English Version)
Standard No.: GB/T 42897-2023 Status:valid remind me the status change

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Target Language:English File Format:PDF
Word Count: 7500 words Translation Price(USD):225.0 remind me the price change

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Implemented on:2023-12-1 Delivery: via email in 1~3 business day

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Standard No.: GB/T 42897-2023
English Name: Micro-electromechanical systems(MEMS) technology―Tensile strength test method for nano-scale membranes of silicon based MEMS
Chinese Name: 微机电系统(MEMS)技术 硅基MEMS纳米厚度膜抗拉强度试验方法
Chinese Classification: L59    Micromodule
Professional Classification: GB    National Standard
Source Content Issued by: SAMR; SAC
Issued on: 2023-08-06
Implemented on: 2023-12-1
Status: valid
Target Language: English
File Format: PDF
Word Count: 7500 words
Translation Price(USD): 225.0
Delivery: via email in 1~3 business day
本文件描述了硅基MEMS加工过程中所涉及的纳米厚度膜轴向抗拉强度原位试验的要求和试验方法。
本文件适用于采用微电子工艺制造的纳米厚度膜抗拉强度测试。
Code of China
Standard
GB/T 42897-2023  Micro-electromechanical systems(MEMS) technology―Tensile strength test method for nano-scale membranes of silicon based MEMS (English Version)
Standard No.GB/T 42897-2023
Statusvalid
LanguageEnglish
File FormatPDF
Word Count7500 words
Price(USD)225.0
Implemented on2023-12-1
Deliveryvia email in 1~3 business day
Detail of GB/T 42897-2023
Standard No.
GB/T 42897-2023
English Name
Micro-electromechanical systems(MEMS) technology―Tensile strength test method for nano-scale membranes of silicon based MEMS
Chinese Name
微机电系统(MEMS)技术 硅基MEMS纳米厚度膜抗拉强度试验方法
Chinese Classification
L59
Professional Classification
GB
ICS Classification
Issued by
SAMR; SAC
Issued on
2023-08-06
Implemented on
2023-12-1
Status
valid
Superseded by
Superseded on
Abolished on
Superseding
Language
English
File Format
PDF
Word Count
7500 words
Price(USD)
225.0
Keywords
GB/T 42897-2023, GB 42897-2023, GBT 42897-2023, GB/T42897-2023, GB/T 42897, GB/T42897, GB42897-2023, GB 42897, GB42897, GBT42897-2023, GBT 42897, GBT42897
Introduction of GB/T 42897-2023
本文件描述了硅基MEMS加工过程中所涉及的纳米厚度膜轴向抗拉强度原位试验的要求和试验方法。
本文件适用于采用微电子工艺制造的纳米厚度膜抗拉强度测试。
Contents of GB/T 42897-2023
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Keywords:
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