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| Chinese National Standard Category: Basic standards and general methods |
| English Title: | Microbeam analysis—Scanning electron microscopy—Method for evaluating critical dimensions by CD-SEM |
| Chinese Title: | 微束分析 扫描电子显微术 CD-SEM评定关键尺寸的方法 |
| Standard No.: | GB/T 46057-2025 |
| Category No.: | G04 |
| Issued by: | SAMR; SAC |
| Issued on: | 2025-08-29 |
| Implemented on: | 2026-3-1 |
| Status: | valid |
| Superseded by: | |
| Superseded on: | |
| Abolished on: | |
| Superseding: | |
| Word Count: | 21000 words |
| Similar Standards: | GB/T 47101-2026 GB/T 47105-2026 GB/T 46057-2025 GB/T 45772-2025 GB/T 45773-2025 GB/T 45769-2025 GB/T 45770-2025 GB/T 45768-2025 GB/T 42658.3-2025 GB/T 32996-2025 GB/T 20175-2025 GB/T 20176-2025 GB/T 19500-2025 GB/T 28634-2025 GB/T 45469-2025 GB/T 45468-2025 GB/T 45459-2025 GB/T 14666-2025 T/CCASC 0047-2024 T/CCASC 0051-2024 |
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