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Standard
| GB/T 12964-2003 Monocrystalline silicon polished wafers (English Version) |
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Detail of GB/T 12964-2003
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Introduction of GB/T 12964-2003
本标准规定了硅单晶抛光片的必要的相关性术语、产品分类、技术要求、试验方法、检测规则以及标志、包装、运输、贮存等。本标准适用于直拉硅单晶研磨片经腐蚀减薄后进行单面抛光制备的硅抛光片。产品主要用于制作集成电路等半导体器件或做为硅外延沉积的衬底。
Contents of GB/T 12964-2003