Standard No.:	T/CAS 304-2018
English Name:	Magnetron sputtering silicon targets and bound targets
Chinese Name:	磁控溅射硅靶材及绑定靶材
Chinese Classification:	L19    Magnetic component
Professional Classification:	T/    Social Organization Standard
ICS Classification:	29.045 29.045    Semiconducting materials 29.045
Source Content Issued by:	CAS
Issued on:	2018-05-29
Implemented on:	2018-5-29
Status:	abolished
Abolished on:	2025-07-01
Target Language:	English
File Format:	PDF

本标准规定了磁控溅射硅靶材的分类及牌号、原料、技术要求、试验方法、检验规则、标志、包装、运输、贮存、供货状态及订货单（或合同）内容。
本标准适用于半导体等电子器件用的各种磁控溅射硅靶材。